| Fundamental failure mechanisms of electrical
overstress/electrostatic discharge (EOS/ESD) and the physics behind
them are the focus of this tutorial. Topics include the primary thermal
failure mechanisms: junction burnout, oxide punch-through, and metallization
burnout. Particular emphasis will be placed on the concept of simulation
fidelity, which is crucial in the design of meaningful and robust
ESD tests. Simulation fidelity is obtained by considering the interplay
of the stress environment with the failure mechanism. Because this
approach is developed for arbitrary stress environments, the considerations
are equally applicable to EOS environments |